Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493845 | Organic bottom antireflective coating composition for nanolithography | Jae Hwan Sim, So Yeon Kim, Jung Kyu Jo, Hye-Won Lee, Jihoon Kang +1 more | 2022-11-08 |
| 11448964 | Coating compositions for use with an overcoated photoresist | Jung-June Lee, Jun-Han Yun, Ji Hoon Kang | 2022-09-20 |
| 11269252 | Method for forming pattern using antireflective coating composition including photoacid generator | Jung-June Lee, Jae Yun Ahn, Jae Hwan Sim, Emad Aqad, Myung Yeol Kim | 2022-03-08 |
| 11262656 | Coating compositions for use with an overcoated photoresist | Jae Hwan Sim, Hye-Won Lee, EunHye Cho, Jung Kyu Jo, Jin Hong Park +1 more | 2022-03-01 |