Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493845 | Organic bottom antireflective coating composition for nanolithography | Jae Hwan Sim, So Yeon Kim, Hye-Won Lee, Jihoon Kang, Jae-Bong Lim +1 more | 2022-11-08 |
| 11262656 | Coating compositions for use with an overcoated photoresist | Jae Hwan Sim, Hye-Won Lee, EunHye Cho, Jin Hong Park, Eui Hyun Ryu +1 more | 2022-03-01 |