Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500291 | Underlying coating compositions for use with photoresists | Jung-June Lee, Jae Yun Ahn, You Rim Shin, Jin Hong Park | 2022-11-15 |
| 11493845 | Organic bottom antireflective coating composition for nanolithography | So Yeon Kim, Jung Kyu Jo, Hye-Won Lee, Jihoon Kang, Jae-Bong Lim +1 more | 2022-11-08 |
| 11269252 | Method for forming pattern using antireflective coating composition including photoacid generator | Jung-June Lee, Jae Yun Ahn, Jae-Bong Lim, Emad Aqad, Myung Yeol Kim | 2022-03-08 |
| 11262656 | Coating compositions for use with an overcoated photoresist | Hye-Won Lee, EunHye Cho, Jung Kyu Jo, Jin Hong Park, Eui Hyun Ryu +1 more | 2022-03-01 |