Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11505565 | Zwitterion compounds and photoresists comprising same | James F. Cameron, James W. Thackeray | 2022-11-22 |
| 11448960 | Salts and photoresists comprising same | James F. Cameron, James W. Thackeray | 2022-09-20 |
| 11269252 | Method for forming pattern using antireflective coating composition including photoacid generator | Jung-June Lee, Jae Yun Ahn, Jae Hwan Sim, Jae-Bong Lim, Myung Yeol Kim | 2022-03-08 |