Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11505565 | Zwitterion compounds and photoresists comprising same | Emad Aqad, James W. Thackeray | 2022-11-22 |
| 11506979 | Method using silicon-containing underlayers | Li Cui, Paul J. LaBeaume, Charlotte Cutler, Suzanne M. Coley, Shintaro Yamada +1 more | 2022-11-22 |
| 11448960 | Salts and photoresists comprising same | Emad Aqad, James W. Thackeray | 2022-09-20 |
| 11360387 | Silicon-containing underlayers | Li Cui, Paul J. LaBeaume, Charlotte Cutler, Shintaro Yamada, Suzanne M. Coley +1 more | 2022-06-14 |