Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11493845 | Organic bottom antireflective coating composition for nanolithography | Jae Hwan Sim, So Yeon Kim, Jung Kyu Jo, Hye-Won Lee, Jihoon Kang +1 more | 2022-11-08 |
| 11448964 | Coating compositions for use with an overcoated photoresist | Jung-June Lee, Jae-Bong Lim, Ji Hoon Kang | 2022-09-20 |