Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422456 | Phase shift mask blank, method for producing phase shift mask, and phase shift mask | Naoki Matsuhashi, Shohei Mimura | 2022-08-23 |
| 11415874 | Method of manufacturing reflective mask blank, reflective mask blank, and method of manufacturing reflective mask | Tsuneo Terasawa, Hideo Kaneko, Yukio Inazuki | 2022-08-16 |
| 11333965 | Phase shift mask blank, manufacturing method thereof, and phase shift mask | — | 2022-05-17 |
| 11327393 | Photomask blank and method for preparing photomask | Yukio Inazuki, Hideo Kaneko | 2022-05-10 |
| 11307490 | Phase shift mask blank and phase shift mask | — | 2022-04-19 |