Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422456 | Phase shift mask blank, method for producing phase shift mask, and phase shift mask | Takuro Kosaka, Shohei Mimura | 2022-08-23 |
| 11402744 | Photomask blank, manufacturing method of photomask and photomask | — | 2022-08-02 |