Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422456 | Phase shift mask blank, method for producing phase shift mask, and phase shift mask | Takuro Kosaka, Naoki Matsuhashi | 2022-08-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11422456 | Phase shift mask blank, method for producing phase shift mask, and phase shift mask | Takuro Kosaka, Naoki Matsuhashi | 2022-08-23 |