Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415874 | Method of manufacturing reflective mask blank, reflective mask blank, and method of manufacturing reflective mask | Hideo Kaneko, Yukio Inazuki, Takuro Kosaka | 2022-08-16 |