Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415874 | Method of manufacturing reflective mask blank, reflective mask blank, and method of manufacturing reflective mask | Tsuneo Terasawa, Yukio Inazuki, Takuro Kosaka | 2022-08-16 |
| 11327393 | Photomask blank and method for preparing photomask | Takuro Kosaka, Yukio Inazuki | 2022-05-10 |