Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500292 | Material for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, patterning process, and compound for forming organic film | Daisuke KORI, Keisuke NIIDA, Takashi SAWAMURA, Seiichiro Tachibana, Tsutomu Ogihara | 2022-11-15 |
| 11492337 | Epoxy compound, resist composition, and pattern forming process | Masayoshi Sagehashi, Ryosuke Taniguchi, Yoshinori Matsui | 2022-11-08 |
| 11307497 | Compound, composition for forming organic film, substrate for manufacturing semiconductor apparatus, method for forming organic film, and patterning process | Seiichiro Tachibana, Keisuke NIIDA, Hiroko Nagai, Takashi SAWAMURA, Tsutomu Ogihara | 2022-04-19 |