Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11492337 | Epoxy compound, resist composition, and pattern forming process | Masayoshi Sagehashi, Takeru Watanabe, Yoshinori Matsui | 2022-11-08 |
| 11215926 | Sulfonium compound, resist composition, and patterning process | Takayuki Fujiwara, Ryo MITSUI, Masaki Ohashi, Koji Hasegawa | 2022-01-04 |