Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11485824 | Thermosetting silicon-containing compound, composition for forming a silicon-containing film, and patterning process | Toshiharu Yano, Kazunori Maeda, Tsutomu Ogihara, Seiichiro Tachibana | 2022-11-01 |
| 11215926 | Sulfonium compound, resist composition, and patterning process | Takayuki Fujiwara, Masaki Ohashi, Ryosuke Taniguchi, Koji Hasegawa | 2022-01-04 |