Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11307497 | Compound, composition for forming organic film, substrate for manufacturing semiconductor apparatus, method for forming organic film, and patterning process | Seiichiro Tachibana, Takeru Watanabe, Keisuke NIIDA, Takashi SAWAMURA, Tsutomu Ogihara | 2022-04-19 |