Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11500292 | Material for forming organic film, substrate for manufacturing semiconductor device, method for forming organic film, patterning process, and compound for forming organic film | Daisuke KORI, Takashi SAWAMURA, Seiichiro Tachibana, Takeru Watanabe, Tsutomu Ogihara | 2022-11-15 |
| 11307497 | Compound, composition for forming organic film, substrate for manufacturing semiconductor apparatus, method for forming organic film, and patterning process | Seiichiro Tachibana, Takeru Watanabe, Hiroko Nagai, Takashi SAWAMURA, Tsutomu Ogihara | 2022-04-19 |