Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380522 | Radical deactivation component, plasma processing apparatus using the same and radical deactivation method | Koji Yamagishi, Shota SASAKI, Daisuke YOSHIKOSHI | 2022-07-05 |
| 11373906 | Through electrode substrate, method of manufacturing through electrode substrate, and mounting substrate | Hiroshi Kudo, Takamasa Takano, Hiroshi Mawatari, Masaaki Asano | 2022-06-28 |