Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380522 | Radical deactivation component, plasma processing apparatus using the same and radical deactivation method | Koji Yamagishi, Shota SASAKI, Shinji Maekawa | 2022-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380522 | Radical deactivation component, plasma processing apparatus using the same and radical deactivation method | Koji Yamagishi, Shota SASAKI, Shinji Maekawa | 2022-07-05 |