Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538697 | Substrate processing apparatus | Sang Ki Nam, Jang-Yeob Lee, Sungyeol Kim, Soonam Park, Siqing Lu | 2022-12-27 |
| 11454882 | Pellicle for reflective mask | Jinhwan Lee, Jeonggil Kim | 2022-09-27 |
| 11415891 | Extreme ultraviolet light source system | Myeongjun Gil, Yebin Nam, Injae Lee | 2022-08-16 |
| 11304287 | Extreme ultraviolet light source systems | Myeongjun Gil, Yebin Nam, Sanghoon Lee, Injae Lee | 2022-04-12 |
| 11231656 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Ho YU, Jeonggil Kim, Minseok Choi | 2022-01-25 |