Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538697 | Substrate processing apparatus | Sang Ki Nam, Jang-Yeob Lee, Sungyeol Kim, Sunghyup Kim, Soonam Park | 2022-12-27 |
| 11244839 | Plasma processing apparatus | Cheonkyu Lee, Takafumi Noguchi | 2022-02-08 |