Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538697 | Substrate processing apparatus | Sang Ki Nam, Sungyeol Kim, Sunghyup Kim, Soonam Park, Siqing Lu | 2022-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538697 | Substrate processing apparatus | Sang Ki Nam, Sungyeol Kim, Sunghyup Kim, Soonam Park, Siqing Lu | 2022-12-27 |