Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11424140 | Member, method of manufacturing the same, apparatus for manufacturing the same, and semiconductor manufacturing apparatus | Changhwan Kim, Toshihiro Iizuka, Kenichi Nagayama | 2022-08-23 |
| 11357403 | Optical coherence tomography apparatus and measurement method | Sohichiro NAKAMURA, Heijiro Hirayama | 2022-06-14 |
| 11309203 | Wafer stage and method of manufacturing the same | Kazuyuki Tomizawa, Masashi Kikuchi, Michio Ishikawa, Kazuhiro Yamamuro | 2022-04-19 |
| 11244839 | Plasma processing apparatus | Cheonkyu Lee, Siqing Lu | 2022-02-08 |