Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11415891 | Extreme ultraviolet light source system | Sunghyup Kim, Yebin Nam, Injae Lee | 2022-08-16 |
| 11304287 | Extreme ultraviolet light source systems | Sunghyup Kim, Yebin Nam, Sanghoon Lee, Injae Lee | 2022-04-12 |