Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11497109 | EUV light concentrating apparatus and lithography apparatus including the same | Chae Mook LIM, Sung Ho JANG, Min Seok Choi | 2022-11-08 |
| 11231656 | Target debris collection device and extreme ultraviolet light source apparatus including the same | Sunghyup Kim, Jeonggil Kim, Minseok Choi | 2022-01-25 |