Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499014 | Cureable formulations for forming low-k dielectric silicon-containing films using polycarbosilazane | Yumin Liu, Peng Zhang, Fan QIN, Gennadiy Itov, Fabrizio Marchegiani +1 more | 2022-11-15 |
| 11482414 | Ultra-low temperature ALD to form high-quality Si-containing film | Naoto NODA, Ivan Oshchepkov | 2022-10-25 |
| 11407922 | Si-containing film forming compositions and methods of making and using the same | Manish Khandelwal, Sean Kerrigan, Antonio Sanchez, Peng Zhang, Yang Wang | 2022-08-09 |
| 11319449 | Area selective deposition of metal containing films | Wontae Noh, Jooho LEE | 2022-05-03 |
| 11261202 | Catalytic reduction of halogenated carbosilanes and halogenated carbodisilanes | Manish Khandelwal, Reno Pesaresi | 2022-03-01 |
| 11242597 | Lanthanide precursors and deposition of lanthanide-containing films using the same | Satoko Gatineau, Daehyeon Kim, Wontae Noh | 2022-02-08 |