Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482414 | Ultra-low temperature ALD to form high-quality Si-containing film | Naoto NODA, Jean-Marc Girard | 2022-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482414 | Ultra-low temperature ALD to form high-quality Si-containing film | Naoto NODA, Jean-Marc Girard | 2022-10-25 |