Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482414 | Ultra-low temperature ALD to form high-quality Si-containing film | Ivan Oshchepkov, Jean-Marc Girard | 2022-10-25 |
| 11427495 | Manufacturing apparatus and manufacturing method of porous glass base material for optical fiber | Hitoshi IINUMA | 2022-08-30 |