Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11319449 | Area selective deposition of metal containing films | Jooho LEE, Jean-Marc Girard | 2022-05-03 |
| 11242597 | Lanthanide precursors and deposition of lanthanide-containing films using the same | Satoko Gatineau, Daehyeon Kim, Jean-Marc Girard | 2022-02-08 |