Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11499014 | Cureable formulations for forming low-k dielectric silicon-containing films using polycarbosilazane | Yumin Liu, Jean-Marc Girard, Peng Zhang, Fan QIN, Gennadiy Itov +1 more | 2022-11-15 |
| 11430663 | Iodine-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Nathan Stafford +2 more | 2022-08-30 |