Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430663 | Iodine-containing compounds for etching semiconductor structures | Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Nathan Stafford, Fabrizio Marchegiani +2 more | 2022-08-30 |