Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469110 | Method to improve profile control during selective etching of silicon nitride spacers | Xiangyu Guo, James Royer, Venkateswara R. Pallem | 2022-10-11 |
| 11430663 | Iodine-containing compounds for etching semiconductor structures | Vijay Surla, Rahul Gupta, Hui SUN, Venkateswara R. Pallem, Fabrizio Marchegiani +2 more | 2022-08-30 |