Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469081 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Tsuyoshi Takeda | 2022-10-11 |
| 11469083 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Tsuyoshi Takeda | 2022-10-11 |
| 11309195 | Heating element, substrate processing apparatus and method of manufacturing semiconductor device | Yoshihiko YANAGISAWA | 2022-04-19 |
| 11264253 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Shinya Sasaki, Noriaki MICHITA | 2022-03-01 |
| 11265977 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yoshihiko YANAGISAWA | 2022-03-01 |
| 11239098 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | — | 2022-02-01 |