Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11309195 | Heating element, substrate processing apparatus and method of manufacturing semiconductor device | Yukitomo HIROCHI | 2022-04-19 |
| 11265977 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Yukitomo HIROCHI | 2022-03-01 |