Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11535931 | Method of manufacturing semiconductor device, method of managing parts, and recording medium | Masaya NISHIDA, Nobuhito Shima, Yosuke KUWATA, Kenichi Maeda | 2022-12-27 |
| 11482415 | Substrate processing apparatus, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Daisuke Hara | 2022-10-25 |
| 11469081 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Tsuyoshi Takeda, Yukitomo HIROCHI | 2022-10-11 |
| 11469083 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Tsuyoshi Takeda, Yukitomo HIROCHI | 2022-10-11 |