Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11535931 | Method of manufacturing semiconductor device, method of managing parts, and recording medium | Nobuhito Shima, Akihiro Sato, Yosuke KUWATA, Kenichi Maeda | 2022-12-27 |
| 11257669 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Akihito Yoshino, Naoko Kitagawa, Shintaro Kogura +1 more | 2022-02-22 |