Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515152 | Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrate | Kazuhiro Harada, Shogo Otani, Koichi Honda, Mamoru Umemoto, Kazuhiro Shimoda +3 more | 2022-11-29 |
| 11434564 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium and method of processing substrate | Kazuhiro Harada, Masayoshi Minami | 2022-09-06 |
| 11257669 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Masayoshi Minami, Akihito Yoshino, Masaya NISHIDA, Naoko Kitagawa +1 more | 2022-02-22 |