Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11515152 | Method of manufacturing semiconductor device, substrate processing apparatus, and method of processing substrate | Shintaro Kogura, Kazuhiro Harada, Shogo Otani, Koichi Honda, Kazuhiro Shimoda +3 more | 2022-11-29 |