Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11434564 | Method of manufacturing semiconductor device, substrate processing apparatus, recording medium and method of processing substrate | Kazuhiro Harada, Shintaro Kogura | 2022-09-06 |
| 11361961 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Kazuyuki Okuda, Syuzo SAKURAI, Yasuhiro Inokuchi | 2022-06-14 |
| 11257669 | Method of manufacturing semiconductor device, surface treatment method, substrate processing apparatus, and recording medium | Kazuhiro Harada, Akihito Yoshino, Masaya NISHIDA, Naoko Kitagawa, Shintaro Kogura +1 more | 2022-02-22 |