Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527401 | Method of processing substate, method of manufacturing semiconductor device, substrate processing apparatus, and recording medium | Masayuki Asai, Tomoki IMAMURA, Yasuhiro Inokuchi, Norikazu Mizuno | 2022-12-13 |
| 11361961 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Syuzo SAKURAI, Yasuhiro Inokuchi, Masayoshi Minami | 2022-06-14 |