Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11469081 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Yukitomo HIROCHI | 2022-10-11 |
| 11469083 | Plasma generating device, substrate processing apparatus, and method of manufacturing semiconductor device | Akihiro Sato, Yukitomo HIROCHI | 2022-10-11 |
| 11380563 | Substrate processing apparatus, plurality of electrodes and method of manufacturing semiconductor device | Daisuke Hara | 2022-07-05 |
| 11295959 | Method of determining plasma abnormality, method of manufacturing semiconductor device, and substrate processing apparatus | Tatsuya NISHINO | 2022-04-05 |