Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11295959 | Method of determining plasma abnormality, method of manufacturing semiconductor device, and substrate processing apparatus | Tsuyoshi Takeda | 2022-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11295959 | Method of determining plasma abnormality, method of manufacturing semiconductor device, and substrate processing apparatus | Tsuyoshi Takeda | 2022-04-05 |