Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264253 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Shinya Sasaki, Yukitomo HIROCHI | 2022-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264253 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Shinya Sasaki, Yukitomo HIROCHI | 2022-03-01 |