Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410291 | System and method for generation of wafer inspection critical areas | Rajesh Manepalli, Ashok Kulkarni, Saibal Banerjee, John Kirkland | 2022-08-09 |
| 11379967 | Methods and systems for inspection of semiconductor structures with automatically generated defect features | Jacob George, Saravanan Paramasivam, Martin Plihal, Niveditha Lakshmi Narasimhan, Sairam Ravu | 2022-07-05 |
| 11379969 | Method for process monitoring with optical inspections | Martin Plihal, Saravanan Paramasivam | 2022-07-05 |
| 11237119 | Diagnostic methods for the classifiers and the defects captured by optical tools | Martin Plihal, Erfan Soltanmohammadi, Saravanan Paramasivam, Sairam Ravu, Ankit Jain +1 more | 2022-02-01 |