Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11518038 | Substrate conveying robot and operation method therefor | Junichi Sugahara | 2022-12-06 |
| 11465299 | State monitoring system and state monitoring method | Hiroyuki Okada, Kazuo Fujimori | 2022-10-11 |
| 11440200 | Monitoring method | Hiroyuki Okada, Atsushi Nakaya | 2022-09-13 |
| 11427412 | Substrate conveying robot and substrate conveying method | Avish Ashok Bharwani, Ming Zeng, Brandon J. Lee, Ryan Le | 2022-08-30 |
| 11335578 | Substrate transfer apparatus and method of measuring positional deviation of substrate | Avish Ashok Bharwani, Ming Zeng, Simon Jeyapalan, Hajime Nakahara | 2022-05-17 |
| 11315823 | Substrate suction-holding structure and substrate transfer robot | Hajime Nakahara | 2022-04-26 |