Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11427412 | Substrate conveying robot and substrate conveying method | Masaya Yoshida, Ming Zeng, Brandon J. Lee, Ryan Le | 2022-08-30 |
| 11335578 | Substrate transfer apparatus and method of measuring positional deviation of substrate | Masaya Yoshida, Ming Zeng, Simon Jeyapalan, Hajime Nakahara | 2022-05-17 |