Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335578 | Substrate transfer apparatus and method of measuring positional deviation of substrate | Masaya Yoshida, Avish Ashok Bharwani, Ming Zeng, Hajime Nakahara | 2022-05-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335578 | Substrate transfer apparatus and method of measuring positional deviation of substrate | Masaya Yoshida, Avish Ashok Bharwani, Ming Zeng, Hajime Nakahara | 2022-05-17 |