Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11335578 | Substrate transfer apparatus and method of measuring positional deviation of substrate | Masaya Yoshida, Avish Ashok Bharwani, Ming Zeng, Simon Jeyapalan | 2022-05-17 |
| 11328947 | Aligner apparatus and alignment method | Haruhiko TAN, Shota TOMINAGA, Hiroyuki Yoshida | 2022-05-10 |
| 11315823 | Substrate suction-holding structure and substrate transfer robot | Masaya Yoshida | 2022-04-26 |