Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476138 | Diagnostic system of substrate transfer hand | Hirohiko Goto, Tetsuya Yoshida, Haruhiko TAN, Katsuhiro Yamashita, Masahiko Sumitomo | 2022-10-18 |
| 11465299 | State monitoring system and state monitoring method | Masaya Yoshida, Hiroyuki Okada | 2022-10-11 |