Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538671 | Plasma processing apparatus and data analysis apparatus | Ryoji Asakura, Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2022-12-27 |
| 11424108 | Plasma processing apparatus | Kazuyuki Ikenaga, Masaki Ishiguro, Shigeru Shirayone | 2022-08-23 |
| 11355324 | Plasma processing method | Kosa Hirota, Koichi Nakaune, Nanako Tamari, Satomi Inoue, Shigeru Nakamoto | 2022-06-07 |
| 11315792 | Plasma processing apparatus and plasma processing method | Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2022-04-26 |
| 11257661 | Plasma processing apparatus | Masaki Ishiguro, Shigeru Shirayone, Kazuyuki Ikenaga, Tomoyuki Tamura | 2022-02-22 |