Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538671 | Plasma processing apparatus and data analysis apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi, Masahiro Sumiya | 2022-12-27 |
| 11437289 | Plasma processing apparatus and plasma processing method | Kousuke Fukuchi, Soichiro Eto, Tsubasa Okamoto, Tatehito Usui, Shigeru Nakamoto | 2022-09-06 |
| 11410836 | Analysis method and semiconductor etching apparatus | Kenji Tamaki, Akira Kagoshima, Daisuke Shiraishi | 2022-08-09 |
| 11404253 | Plasma processing apparatus and analysis method for analyzing plasma processing data | Daisuke Shiraishi, Akira Kagoshima, Satomi Inoue | 2022-08-02 |